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TFT Photo Resists
TFT Photo Resists
This positive type of photo resists can be used for formation of TFT devices in TFT LCD.
The photo resists can be applied to spin, slit/spin or slit coating processes and the viscosity can be adjusted by requirement.
Characteristics
- Good coating uniformity
- Good CD uniformity
- Low film loss
- High throughput
- High sensitivity
- High resolution
- Wide process window
- Easy to remove
- Good adhesion